ABS     Format: B:n (invariant)     Used by: S2F25 S2F26
    any binary string         Example: "B:18 0x00 0x01 0x03 0x03 0x0a 0x0d 0x1b 0x5d 0x18 0x18 0x18 0x1a 0x04 0x13 0x7f 0x80 0xfe 0xff"

ACCESSMODE     Format: U1:1 (invariant)     Used by: S3F21 S3F27
    load port access mode         Example: "U1:1 0"

0 - Manual
1 - Auto

ACDS     Format: U2:1 (varies)     Used by: S7F22
    after command codes         Example: "U2:1 0"

ACKA     Format: TF:1 (invariant)     Used by: S5F14 S5F15 S5F18 S16F4 S16F6 S16F7 S16F12 S16F16 S16F18 S16F24 S16F26 S16F28 S16F30 S17F4 S17F8 S17F14
    request success         Example: "TF:1 1"

ACKC10     Format: B:1 (invariant)     Used by: S10F2 S10F4 S10F6 S10F10
    acknowledge code         Example: "B:1 0x00"

0 - accepted for display
1 - message will not be displayed
2 - terminal not available

ACKC13     Format: B:1 (invariant)     Used by: S13F2 S13F4 S13F6 S13F8
    acknowledge code, 0 ok         Example: "B1:1 0x00"

1 - retryable error
2 - unknown data set name
3 - illegal checkpoint value
4 - too many open data sets
5 - data set opened too many times
6 - no open data set
7 - cannot continue
8 - end of data
9 - handle in use
10 - pending transaction

ACKC15     Format: B:1 (invariant)     Used by: S15F50 S15F52
    acknowledge code, 0 ok         Example: "B1:1 0x00"

1 - initiated for asynchronous completion
2 - DSNAME not found
3 - permission not granted
4 - non-specified error

ACKC3     Format: B:1 (invariant)     Used by: S3F6 S3F8 S3F10
    acknowledge code, 0 ok         Example: "B:1 0x00"

ACKC5     Format: B:1 (invariant)     Used by: S5F2 S5F4
    acknowledge code, 0 ok         Example: "B:1 0x00"

ACKC6     Format: B:1 (invariant)     Used by: S6F2 S6F4 S6F10 S6F12 S6F14 S6F26
    acknowledge code, 0 ok         Example: "B:1 0x00"

ACKC7     Format: B:1 (invariant)     Used by: S7F4 S7F12 S7F14 S7F16 S7F18 S7F24 S7F32 S7F38 S7F40 S7F42 S7F44
    S7 acknowledge code         Example: "B:1 0x00"

0 - Accepted
1 - Permission not granted
2 - length error
3 - matrix overflow
4 - PPID not found
5 - unsupported mode
6 - initiated for asynchronous completion
7 - storage limit error

ACKC7A     Format: U4:1 (varies)     Used by: S7F27
    process program check code         Example: "U4:1 0"

0 - ok
1 - inconsistent MDLN
2 - inconsistent SOFTREV
3 - invalid CCODE
4 - invalid PPARM value
5 - error described by ERRW7

AGENT     Format: A:n (invariant)     Used by: S15F11 S15F12 S15F21 S15F22 S15F25
    no description, no max length         Example: "A:20 admin@model-shop.net"

ALCD     Format: B:1 (invariant)     Used by: S5F1 S5F6 S5F8
    alarm code byte, >= 128 alarm is set, bit field use is deprecated         Example: "B:1 0x00"

ALED     Format: B:1 (invariant)     Used by: S5F3
    enable/disable alarm, 128 means enable, 0 disable         Example: "B:1 0x00"

0 - disable alarm
128 - enable alarm

ALID     Format: U4:1 (varies)     Used by: S5F1 S5F3 S5F6 S5F8
    Alarm type ID         Example: "U4 1000"

ALIDVECTOR     Format: U4:n (varies)     Used by: S5F5
    alarm ID vector         Example: "U4:0"

ALTX     Format: A:120 (invariant)     Used by: S5F1 S5F6 S5F8
    alarm text, the length limit was recently raised from 40         Example: "A:31 {sensor timeout at load elevator}"

ASSGNID     Format: U1:1 (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    Assigner of the RecipeXID Base Part         Example: "U1 0"

0 - RMSASN
1 - EQUASN

ATTRDATA     Format: A:n (varies)     Used by: S1F20 S3F35 S3F35 S13F13 S13F16 S14F1 S14F2 S14F3 S14F4 S14F9 S14F10 S14F11 S14F12 S14F13 S14F14 S14F15 S14F16 S14F17 S14F18 S18F2 S18F3
    a specific attribute value of any data type         Example: "A:26 http://208.112.85.149/secs"

ATTRID     Format: A:40 (varies)     Used by: S1F19 S3F35 S3F35 S13F13 S13F16 S14F1 S14F1 S14F2 S14F3 S14F4 S14F8 S14F9 S14F10 S14F11 S14F12 S14F13 S14F14 S14F15 S14F16 S14F17 S14F18 S18F1 S18F3
    identifies an attribute type, chars 0x20-0x7e but not >, :, ?, *, or ~. Does not begin or end with space.         Example: "A:9 SourceURL"

ATTRRELN     Format: U1:1 (invariant)     Used by: S14F1
    relationship of a value to an attribute value of an object         Example: "U1:1 0"

0 - equal
1 - not equal
2 - value < obj attribute value
3 - value <= obj attribute value
4 - value > obj attribute value
5 - value >= obj attribute value
6 - value is a member of obj attribute value set
7 - value is not a member of obj attribute value set

AUTOCLEAR_DISABLE     Format: U1:1 (invariant)     Used by: S20F1
    Disable automatic clear of recipes on SRO transition to Local (E171)         Example: "U1:1 0"

0 - autoclear is not disabled
1 - autoclear is disabled

AUTOCLOSE     Format: U2:1 (invariant)     Used by: S20F1
    Interaction timeout for closing operator session, 0 is no limit         Example: "U1:1 0"

AUTOPOST_DISABLE     Format: U1:1 (invariant)     Used by: S20F1
    Disable automatic posting of recipes to RMS preceeding SRO move to Local state (E171)         Example: "U1:1 0"

0 - autopost is not disabled
1 - autopost is disabled

BCDS     Format: U2:n (varies)     Used by: S7F22
    before command code vector         Example: "U2:4 72 85 109 101"

BCEQU     Format: U1:n (varies)     Used by: S12F3 S12F4
    array of bin code equivalents         Example: "U1:3 1 2 3"

BINLT     Format: U1:n (varies)     Used by: S12F7 S12F9 S12F11 S12F14 S12F16 S12F18
    array of bin values, text or U1 array         Example: "U1:3 3 4 5"

BLKDEF     Format: I1:1 (invariant)     Used by: S7F22
    command definition block relationship, standard incorrectly says type U1 is possible         Example: "I1:1 0"

-1 - terminates a block
0 - within block body
1 - starts a block

BPD     Format: B:n (invariant)     Used by: S8F2
    boot program data, the fantasy of using SECS for boot programs has been revived         Example: "B:0"

BYTMAX     Format: U4:1 (varies)     Used by: S7F22
    process program maximum byte length, 0 means no limit         Example: "U4:1 0"

CAACK     Format: U1:1 (invariant)     Used by: S3F18 S3F20 S3F22 S3F24 S3F26 S3F28 S3F30 S3F32 S3F34
    carrier action acknowledge         Example: "U1:1 0"

0 - ok
1 - invalid command
2 - cannot perform now
3 - invalid data or argument
4 - initiated for asynchronous completion
5 - rejected - invalid state
6 - command performed with errors

CARRIERACTION     Format: A:n (invariant)     Used by: S3F17
    carrier action request         Example: "A:18 {ProceedWithCarrier}"

CARRIERID     Format: A:n (invariant)     Used by: S3F17 S16F11 S16F15
    carrier ID         Example: "A:9 {CSX 52078}"

CARRIERSPEC     Format: A:n (invariant)     Used by: S3F29 S3F31
    carrier object specifier (OBJSPEC)         Example: "A:17 {Carrier:CSX 52078}"

CATTRDATA     Format: A:n (varies)     Used by: S3F17
    carrier attribute value (any data type)         Example: "A:7 product"

CATTRID     Format: A:n (varies)     Used by: S3F17
    carrier attribute identifier, E87 requires text per E39.1, Sec 6         Example: "A:5 Usage"

CCEACK     Format: U1:1 (invariant)     Used by: S20F8
    event completion code         Example: "U1:1 0"

0 - Success
1 - Error

CCODE     Format: A:n (varies)     Used by: S7F22 S7F23 S7F26 S7F31
    process operation command code         Example: "A:5 {50 54}"

CEED     Format: TF:1 (invariant)     Used by: S2F37 S17F5
    collection event or trace enablement, true is enabled         Example: "TF:1 1"

CEID     Format: U4:1 (varies)     Used by: S1F23 S1F24 S2F35 S2F37 S2F55 S2F56 S2F58 S6F3 S6F8 S6F9 S6F11 S6F13 S6F15 S6F16 S6F17 S6F18 S17F9 S17F10 S17F11 S17F12
    collection event identifier, GEM requires type Un         Example: "U4:1 4050"

CEIDSTART     Format: U4:1 (varies)     Used by: S17F5
    the CEID of a start event         Example: "U4:1 4050"

CEIDSTOP     Format: U4:1 (varies)     Used by: S17F5
    the CEID of a stop event         Example: "U4:1 4050"

CENAME     Format: A:n (invariant)     Used by: S1F24 S2F56
    a descriptive name for a Data Collection Event         Example: "A ProcessStateUpdate"

CEPACK     Format: B:1 (invariant)     Used by: S2F50
    command enhanced parameter acknowledge, may be a list or nested list structure to mirror the input structure of a CEPVAL         Example: "B:1 0x00"

1 - CPNAME value not defined
2 - illegal value for CEPVAL
3 - illegal format for CEPVAL
4 - CPNAME not valis as used

CEPVAL     Format: A:n (varies)     Used by: S2F49
    an enhanced parameter value, may be a scalar of any type, a list of values of the same type, or a list of possibly nested {L:2 CPNAME CEPVAL}         Example: "A:0"

CHKINFO     Format: A:n (varies)     Used by: S20F31
    User defined value, any type         Example: "A:44 {S20 has inverted booleans specified as enums}"

CKPNT     Format: U4:1 (invariant)     Used by: S13F3 S13F6
    data set checkpoint defined by sender         Example: "U4:1 28956"

CMDA     Format: B:1 (invariant)     Used by: S2F22 S2F28
    command acknowledge code         Example: "B:1 0x00"

0 - ok
1 - command does not exist
2 - not now

CMDMAX     Format: U1:1 (varies)     Used by: S7F22
    maximum number of commands allowed, 0=unlimited         Example: "U1:1 0"

CNAME     Format: A:16 (invariant)     Used by: S7F22
    text name for a CCODE         Example: "A:13 {spin motor on}"

COACK     Format: U1:1 (invariant)     Used by: S20F10
    service completion code         Example: "U1:1 0"

0 - Success
1 - Error

COLCT     Format: U4:1 (varies)     Used by: S12F1 S12F4
    column count in die increments         Example: "U4:1 30"

COLHDR     Format: A:20 (invariant)     Used by: S13F13 S13F15 S13F16
    table column name         Example: "A:4 Code"

COMMACK     Format: B:1 (invariant)     Used by: S1F14
    establish communications acknowledgement code         Example: "B:1 0x00"

0 - ok
1 - denied

COMPARISONOPERATOR     Format: U1:1 (invariant)     Used by: S19F1
    choice of comparison operators. Interpreted as "target <op> <const>" where <op> is this value and <const> is supplied in the expression         Example: "U1:1 0"

0 - equals
1 - not equal to
2 - less than
3 - less than or equal to
4 - greater than
5 - greater than or equal to
6 - contains the substring
7 - does not contain the substring

CONDITION     Format: A:n (invariant)     Used by: S18F16
    sub-system condition info tag

COPYID     Format: U1:1 (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    Recipe copy type         Example: "U1:1 0"

CPACK     Format: B:1 (invariant)     Used by: S2F42
    remote command parameter acknowledge, only received if error         Example: "B:1 0x01"

1 - unknown CPNAME
2 - illegal value for CPVAL
3 - illegal format for CPVAL

CPNAME     Format: A:n (varies)     Used by: S2F41 S2F42 S2F49 S2F50 S4F21 S4F29 S16F5 S16F27
    command parameter name         Example: "A:10 ppexecname"

CPVAL     Format: A:n (varies)     Used by: S2F41 S4F21 S4F29 S16F5 S16F27 S18F13
    command parameter value, any scalar type         Example: "A:14 cmos168-zl0EC3"

CSAACK     Format: U1:1 (invariant)     Used by: S2F8
    equipment acknowledge code         Example: "U1:1 0"

0 - success
1 - busy
2 - invalid SPID
3 - invalid data

CTLJOBCMD     Format: U1:1 (invariant)     Used by: S16F27
    control job command         Example: "U1:1 1"

1 - start
2 - pause
3 - resume
4 - cancel
5 - deselect
6 - stop
7 - abort
8 - HOQ

CTLJOBID     Format: A:n (invariant)     Used by: S16F27
    control job ID, an OBJID         Example: "A:7 {job0001}"

DATA     Format: A:n (varies)     Used by: S3F30 S3F31 S18F6 S18F7
    unformatted data         Example: "A:0"

DATAACK     Format: B:1 (invariant)     Used by: S14F22
    Acknowledgement code         Example: "B:1 0"

0 - OK
1 - unknown DATAID
2 - at least one parameter is invalid

DATAID     Format: U4:1 (varies)     Used by: S2F33 S2F35 S2F39 S2F45 S2F49 S3F15 S3F17 S4F19 S4F25 S6F3 S6F5 S6F7 S6F8 S6F9 S6F11 S6F13 S6F16 S6F18 S6F25 S6F27 S13F11 S13F13 S13F15 S14F19 S14F21 S14F23 S15F1 S15F13 S15F15 S15F21 S15F23 S15F25 S15F27 S15F29 S15F33 S15F35 S15F39 S15F41 S15F43 S15F45 S15F47 S16F1 S16F3 S16F5 S16F11 S16F15 S17F1 S17F5 S17F9
    an identifier to correlate related messages         Example: "U4:1 1"

DATALENGTH     Format: U4:1 (varies)     Used by: S2F39 S3F15 S3F29 S3F31 S4F25 S6F5 S13F11 S14F23 S16F1 S18F5 S18F7 S19F19
    total bytes of the message body         Example: "U4:1 649"

DATASEG     Format: A:n (varies)     Used by: S3F29 S3F31 S18F5 S18F7
    identifies data requested, E87 requires text         Example: "A:3 S01"

DATASRC     Format: A:n (invariant)     Used by: S17F1
    identifies a data source, use length 0 to mean the default         Example: "A:0"

DATLC     Format: U1:1 (invariant)     Used by: S12F19
    location of invalid data, offset in bytes in the SECS-II message body         Example: "U1:1 200"

DELRSPSTAT     Format: U1:1 (invariant)     Used by: S19F4
    Response code for the PDE deletion request, non-zero means not deleted         Example: "U1:1 0"

0 - OK
1 - not found
2 - locked
255 - other error

DIRRSPSTAT     Format: U1:1 (invariant)     Used by: S19F2
    get dir status response         Example: "U1:1 0"

0 - OK
1 - BadFilter
2 - BadAttribute
255 - Other error

DRACK     Format: B:1 (invariant)     Used by: S2F34
    define report acknowledge         Example: "B:1 0x00"

0 - ok
1 - out of space
2 - invalid format
3 - 1 or more RPTID already defined
4 - 1 or more invalid VID

DRRACK     Format: U1:1 (invariant)     Used by: S20F14
    service completion code         Example: "U1:1 0"

0 - done
1 - error

DSID     Format: A:n (varies)     Used by: S6F3 S6F8 S6F9
    data set ID, akin to a report type         Example: "A:2 {12}"

DSNAME     Format: A:50 (varies)     Used by: S7F37 S7F39 S7F41 S7F43 S13F1 S13F2 S13F3 S13F4 S15F49 S15F51
    the name of a dataset such as a PPID         Example: "A:28 {process program save archive}"

DSPER     Format: A:6 (varies)     Used by: S2F23
    data sample period, hhmmss is always supported, A:8 hhmmsscc may be supported         Example: "A:6 000500"

DUTMS     Format: A:n (invariant)     Used by: S12F1 S12F4
    die units of measure (per E5 Section 12)         Example: "A:2 {mm}"

DVNAME     Format: U4:1 (varies)     Used by: S6F3 S6F8
    data value name, generically a VID, therefore GEM requires Un type         Example: "U4:1 10"

DVVAL     Format: A:n (varies)     Used by: S6F3 S6F8 S6F9
    data value, any format including list         Example: "A:2 {54}"

DVVALNAME     Format: A:n (invariant)     Used by: S1F22
    a descriptive name for a Data Value variable (DVVAL)         Example: "A EventName"

EAC     Format: B:1 (invariant)     Used by: S2F16
    equipment acknowledge code, 0 ok         Example: "B:1 0x00"

0 - ok
1 - one or more constants does not exist
2 - busy
3 - one or more values out of range

ECDEF     Format: A:n (varies)     Used by: S2F30
    equipment constant default value         Example: "A:1 {0}"

ECID     Format: U4:1 (varies)     Used by: S2F13 S2F15 S2F29 S2F30
    equipment constant ID, GEM requires U4         Example: "U4:1 220"

ECMAX     Format: A:n (varies)     Used by: S2F30
    equipment constant maximum value, any scalar type         Example: "A:3 100"

ECMIN     Format: A:n (varies)     Used by: S2F30
    equipment constant minimum value, any scalar type         Example: "A:1 0"

ECNAME     Format: A:n (invariant)     Used by: S2F30
    equipment constant name         Example: "A:10 TimeFormat"

ECV     Format: A:n (varies)     Used by: S2F14 S2F15
    equipment constant value, any scalar type (constant is a misnomer)         Example: "A:1 1"

EDID     Format: A:80 (varies)     Used by: S9F13
    expected data identification, PPID or SPID or PTN         Example: "A:12 {example PPID}"

EMID     Format: A:16 (varies)     Used by: S3F9
    equivalent material ID         Example: "A:1 {1}"

EPD     Format: B:n (invariant)     Used by: S8F4
    executive program data, the fantasy of using SECS for this has been revived         Example: "B:0"

EQID     Format: A:256 (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    recipe specification of compatible equipment         Example: "A:11 {Nimbus 2000}"

EQNAME     Format: A:80 (invariant)     Used by: S4F27
    factory assigned equipment identifier         Example: "A:14 {nadasorter 103}"

EQUSERID     Format: A:64 (invariant)     Used by: S20F5
    Equipment userID for recipe use authentication         Example: "A:8 sysadmin"

ERACK     Format: B:1 (invariant)     Used by: S2F38
    enable/disable event report acknowledge         Example: "B:1 0x00"

0 - ok
1 - denied

ERRCODE     Format: U4:1 (varies)     Used by: S1F20 S3F18 S3F20 S3F22 S3F24 S3F26 S3F28 S3F30 S3F32 S3F34 S3F36 S4F20 S4F22 S4F23 S4F31 S4F33 S5F14 S5F15 S5F18 S6F25 S6F30 S13F14 S13F16 S14F2 S14F4 S14F6 S14F8 S14F10 S14F12 S14F14 S14F16 S14F18 S14F20 S14F21 S14F26 S14F28 S15F4 S15F6 S15F8 S15F10 S15F12 S15F14 S15F16 S15F18 S15F20 S15F22 S15F24 S15F26 S15F28 S15F30 S15F32 S15F34 S15F36 S15F38 S15F40 S15F42 S15F44 S15F48 S15F53 S16F4 S16F6 S16F7 S16F12 S16F16 S16F18 S16F24 S16F26 S16F28 S17F2 S17F4 S17F6 S17F8 S17F10 S17F12 S17F14
    error code         Example: "U4 2"

0 - ok
1 - unknown object
2 - unknown class
3 - unknown object instance
4 - unknown attribute type
5 - read-only attribute
6 - unknown class
7 - invalid attribute value
8 - syntax error
9 - verification error
10 - validation error
11 - object ID in use
12 - improper parameters
13 - missing parameters
14 - unsupported option requested
15 - busy
16 - unavailable
17 - command not valid in current state
18 - no material altered
19 - partially processed
20 - all material processed
21 - recipe specification error
22 - failure when processing
23 - failure when not processing
24 - lack of material
25 - job aborted
26 - job stopped
27 - job cancelled
28 - cannot change selected recipe
29 - unknown event
30 - duplicate report ID
31 - unknown data report
32 - data report not linked
33 - unknown trace report
34 - duplicate trace ID
35 - too many reports
36 - invalid sample period
37 - group size too large
38 - recovery action invalid
39 - busy with previous recovery
40 - no active recovery
41 - recovery failed
42 - recovery aborted
43 - invalid table element
44 - unknown table element
45 - cannot delete predefined
46 - invalid token
47 - invalid parameter
48 - Load port does not exist
49 - Load port is busy
50 - missing carrier
32768 - deferred for later initiation
32769 - can not be performed now
32770 - failure from errors
32771 - invalid command
32772 - client alarm
32773 - duplicate clientID
32774 - invalid client type
32775 - incompatible versions
32776 - unknown clientID
32777 - Unsuccessful completion
32778 - failed intervention needed
32779 - detected obstacle
32780 - material not sent
32781 - material not received
32782 - material lost
32783 - hardware error
32784 - transfer cancelled

ERRTEXT     Format: A:80 (invariant)     Used by: S1F20 S3F18 S3F20 S3F22 S3F24 S3F26 S3F28 S3F30 S3F32 S3F34 S3F36 S4F20 S4F22 S4F23 S4F31 S4F33 S5F14 S5F15 S5F18 S6F25 S13F14 S13F16 S14F2 S14F4 S14F6 S14F8 S14F10 S14F12 S14F14 S14F16 S14F18 S14F20 S14F21 S14F26 S14F28 S15F4 S15F6 S15F8 S15F10 S15F12 S15F14 S15F16 S15F18 S15F20 S15F22 S15F24 S15F26 S15F28 S15F30 S15F32 S15F34 S15F36 S15F38 S15F40 S15F42 S15F44 S15F48 S15F53 S16F4 S16F6 S16F7 S16F12 S16F16 S16F18 S16F24 S16F26 S16F28 S17F4 S17F8 S17F14
    description of ERRCODE         Example: "A:8 {no error}"

ERRW7     Format: A:n (varies)     Used by: S7F27
    process program error description         Example: "A:27 {MODLN value is inconsistent}"

EVNTSRC     Format: A:n (invariant)     Used by: S17F5 S17F9 S17F10 S17F11 S17F12
    identifies an event source, use length 0 to specify the default         Example: "A:0"

EVNTSRC2     Format: A:n (invariant)     Used by: S17F5
    a second event source EVNTSRC         Example: "A:0"

EXID     Format: A:20 (invariant)     Used by: S5F9 S5F11 S5F13 S5F14 S5F15 S5F17 S5F18
    exception identifier         Example: "A:10 {out of ink}"

EXMESSAGE     Format: A:n (invariant)     Used by: S5F9 S5F11
    exception description         Example: "A:30 {ink not sensed at nozzle inlet}"

EXRECVRA     Format: A:40 (invariant)     Used by: S5F9 S5F13
    exception recovery action description         Example: "A:33 {manually insert new ink cartridge}"

EXTYPE     Format: A:5 (invariant)     Used by: S5F9 S5F11
    exception type, "ALARM" or "ERROR"         Example: "A:5 {ALARM}"

FCNID     Format: U1:1 (invariant)     Used by: S2F43 S2F44 S2F60
    message type function value         Example: "U1:1 13"

FFROT     Format: U2:1 (invariant)     Used by: S12F1 S12F3
    film frame location in degrees clockwise from bottom         Example: "U2:1 0"

FILDAT     Format: B (varies)     Used by: S13F6
    Data Set Data, binary or ascii. Max length is the RECLEN from open.

FNLOC     Format: U2:1 (invariant)     Used by: S12F1 S12F3 S12F4
    flat/notch location in degrees clockwise from bottom         Example: "U2:1 0"

FRMLEN     Format: U4:1 (varies)     Used by: S7F34
    formatted process program length if available, else 0         Example: "U4:1 0"

GETRSPSTAT     Format: U1:1 (invariant)     Used by: S19F6 S19F8
    Response code for PDE queries, non-zero indicates failure         Example: "U1:1 0"

0 - OK
1 - not found
2 - locked
3 - not allowed
255 - other error

GOILACK     Format: U1:1 (invariant)     Used by: S20F4
    completion code         Example: "U1:1 0"

0 - ok
1 - Error

GRANT     Format: B:1 (invariant)     Used by: S2F2 S2F40 S3F16 S4F26 S13F12 S14F24 S16F2 S19F20
    multiblock grant code         Example: "B:1 0x00"

0 - ok
1 - busy
2 - insufficient space
3 - duplicate DATAID

GRANT6     Format: B:1 (invariant)     Used by: S6F6
    multblock permission grant         Example: "B:1 0x00"

0 - ok
1 - busy
2 - not interested

GRNT1     Format: B:1 (invariant)     Used by: S12F6
    grant code         Example: "B:1 0x00"

0 - ok
1 - retryable busy
2 - no space
3 - map too large
4 - duplicate ID
5 - material ID not found
6 - unknown map format

GRXLACK     Format: U1:1 (invariant)     Used by: S20F12
    service completion code         Example: "U1:1 0"

0 - done
1 - error

HANDLE     Format: U4 (varies)     Used by: S13F3 S13F4 S13F5 S13F6 S13F7 S13F8
    logical unit or handle for a data set         Example: "U4: 1"

HCACK     Format: B:1 (invariant)     Used by: S2F42 S2F50
    remote command acknowledge         Example: "B:1 0x00"

0 - ok, completed
1 - invalid command
2 - cannot do now
3 - parameter error
4 - initiated for asynchronous completion
5 - rejected, already in desired condition
6 - invalid object

HOACK     Format: TF:1 (invariant)     Used by: S4F31 S4F33
    handoff success flag         Example: "TF:1 1"

HOCANCELACK     Format: U1:1 (invariant)     Used by: S4F37
    hand off cancel ack         Example: "U1:1 0"

0 - ok
1 - TRLINK value not known
2 - rejected - handoff started

HOCMDNAME     Format: A:n (varies)     Used by: S4F29
    handoff command identifier         Example: "A:5 {allez}"

HOHALTACK     Format: U1:1 (invariant)     Used by: S4F41
    hand off halt ack         Example: "U1:1 0"

0 - ok
1 - TRLINK value unknown

IACDS     Format: U2:n (varies)     Used by: S7F22
    vector of immediately after command codes         Example: "U2:3 50 93 46"

IBCDS     Format: U2:n (varies)     Used by: S7F22
    vector of immediately before command codes         Example: "U2:2 24 87"

IDTYP     Format: B:1 (invariant)     Used by: S12F1 S12F3 S12F4 S12F5 S12F7 S12F9 S12F11 S12F13 S12F14 S12F15 S12F16 S12F17 S12F18
    ID type         Example: "B 1"

0 - Wafer ID
1 - Wafer Cassette ID
2 - Film Frame ID

INPTN     Format: B:1 (invariant)     Used by: S3F35
    input material port number         Example: "B:1 0x00"

ITEMACK     Format: B:1 (invariant)     Used by: S21F2 S21F4 S21F6 S21F8 S21F10 S21F12 S21F12 S21F14 S21F16 S21F18 S21F20
    item request return code         Example: "B:1 0"

0 - ok
1 - invalid item type
2 - invalid itemID
3 - one or more invalid item part
4 - size limit exceeded
5 - busy, retry later
6 - already obtained
7 - permission denied
8 - unknown item
9 - invalid content
10 - invalid version
11 - insufficient space
12 - too many items
13 - unspecified error
32 - retry

ITEMERROR     Format: A:1024 (invariant)     Used by: S21F2 S21F4 S21F6 S21F8 S21F10 S21F12 S21F14 S21F16 S21F18 S21F20
    error description, empty on success         Example: "A:31 {file system directory not found}"

ITEMID     Format: A:256 (invariant)     Used by: S21F1 S21F3 S21F5 S21F6 S21F8 S21F11 S21F12 S21F13 S21F15 S21F16 S21F17
    item identifier         Example: "A:26 conditionHiTempChamber.rcp"

ITEMINDEX     Format: U4:1 (invariant)     Used by: S21F17
    1-based index of a component part, 0 means done, 0xFFFFFFFF means abort         Example: "U4:1 1"

ITEMLENGTH     Format: U4:1 (varies)     Used by: S21F1 S21F3 S21F6 S21F8 S21F13 S21F16 S21F17
    sum of item part lengths in bytes, not a message length, type U4 or U8         Example: "U4:1 15440"

ITEMPART     Format: A:n (varies)     Used by: S21F3 S21F6 S21F17
    component part of an item, may be data type A:n or B:n         Example: "A:0 "

ITEMPARTCOUNT     Format: U4:1 (invariant)     Used by: S21F13 S21F16 S21F17
    total number of item parts as split for transfer         Example: "U4: 16"

ITEMPARTLENGTH     Format: U4:1 (invariant)     Used by: S21F17
    length of a specific item part presumably in bytes         Example: "U4: 1 1024"

ITEMTYPE     Format: A:n (invariant)     Used by: S21F1 S21F3 S21F5 S21F6 S21F7 S21F8 S21F10 S21F11 S21F12 S21F13 S21F15 S21F16 S21F17 S21F19 S21F20
    case-sensitve type of an item         Example: "A:30 SEMI:UNFORMATTEDPROCESSPROGRAM"

ITEMTYPESUPPORT     Format: U4:1 (invariant)     Used by: S21F20
    bitfield to specify which S21Fx messages accepted         Example: "U4:1 0"

1 - bit 1, S21F1 Item Load Inquire
2 - bit 2, S21F3 Item Send
4 - bit 3, S21F5 Item Request
8 - bit 4, S21F7 Item Type List Request
16 - bit 5, S21F9 Supported Item Type List Request
32 - bit 6, S21F11 delete
64 - bit 7, S21F13 request permission
128 - bit 8, S21F15 item request
256 - bit 9, S21F17 send item part

ITEMVERSION     Format: A:n (invariant)     Used by: S21F1 S21F3 S21F6 S21F8 S21F13 S21F16 S21F17
    version value, empty for unknown, default is time last modified YYYYMMDDhhmmsscc in the equipment timezone         Example: "A:16 2020071613213423"

JOBACTION     Format: A:n (invariant)     Used by: S3F35
    reticle transfer command         Example: "A:8 {simulate}"

LENGTH     Format: U4:1 (invariant)     Used by: S2F1 S7F1 S7F29
    program length in bytes         Example: "U4:1 322"

LIMITACK     Format: B:1 (invariant)     Used by: S2F46
    variable limit value error code         Example: "B:1 0x01"

1 - LIMITID does not exist
2 - UPPERDB> LIMITMAX
3 - LOWERDB < LIMITMIN
4 - UPPERDB < LOWERDB
5 - illegal format for upper or lower bound
6 - non numeric ASCII value specified
7 - duplicate limit definition for this variable

LIMITID     Format: B:1 (invariant)     Used by: S2F45 S2F46 S2F48
    identifies a specific limit         Example: "B:1 0x00"

LIMITMAX     Format: F4:1 (varies)     Used by: S2F48
    The maximum value allowed for the upper dead band limit         Example: "F4:1 250.0"

LIMITMIN     Format: F4:1 (varies)     Used by: S2F48
    The minimum value allowed for the lower dead band limit         Example: "F4:1 20.0"

LINKID     Format: U4:1 (invariant)     Used by: S6F25 S14F20 S14F21 S15F22 S15F30
    correlates the RMOPID value in a request to a completion report         Example: "U4:1 1"

LOC     Format: B:1 (invariant)     Used by: S2F27 S3F2
    material location code         Example: "B:1 0x00"

LOCID     Format: A:n (varies)     Used by: S3F29 S3F31
    logical ID of carrier location, E87 requires text         Example: "A {LP1}"

LOWERDB     Format: F4:1 (varies)     Used by: S2F45 S2F48
    the lower bound of a deadband limit         Example: "F4:1 183.0"

LRACK     Format: B:1 (invariant)     Used by: S2F36
    link report acknowledge         Example: "B:1 0x00"

0 - ok
1 - out of space
2 - invalid format
3 - 1 or more CEID links already defined
4 - 1 or more CEID invalid
5 - 1 or more RPTID invalid

LVACK     Format: B:1 (invariant)     Used by: S2F46
    variable limit error code         Example: "B:1 0x01"

1 - no such VID
2 - limits not support for VID
3 - variable repeated
4 - limit value error

MAPER     Format: B:1 (invariant)     Used by: S12F19
    map error         Example: "B:1 0x00"

0 - ID not found
1 - invalid data
2 - format error

MAPFT     Format: B:1 (invariant)     Used by: S12F3 S12F5
    map data format type         Example: "B:1 0x00"

0 - row format
1 - array format
2 - coordinate format

MAXNUMBER     Format: U2:1 (invariant)     Used by: S20F25
    subspace maximum         Example: "U2:1 128"

MAXTIME     Format: U2:1 (invariant)     Used by: S20F25
    maximum minutes for a PEM recipe to be preserved in PRC post use, 0 means NA         Example: "U2:1 128"

MCINDEX     Format: U4:1 (varies)     Used by: S4F29 S4F31
    correlation value for handoff command         Example: "U4:1 1001"

MDACK     Format: B:1 (invariant)     Used by: S12F8 S12F10 S12F12
    map data ack         Example: "B:1 0x00"

0 - ok
1 - format error
2 - no ID match
3 - abort/discard map

MDLN     Format: A:20 (invariant)     Used by: S1F2 S1F13 S1F14 S7F22 S7F23 S7F26 S7F31
    equipment model type         Example: "A:6 gemsim"

MEXP     Format: A:6 (invariant)     Used by: S9F13
    message expected in form of SxxFyy         Example: "A:6 S07F02"

MF     Format: B:1 (varies)     Used by: S3F2 S3F4 S3F5 S3F7 S16F3 S16F11 S16F15
    material format code, ASCII indicates generic units, E40 restricts to B:1         Example: "B:1 0x01"

1 - wafers
2 - cassettes
3 - die
4 - boats
5 - ingots
6 - leadframes
7 - lots
8 - magazines
9 - packages
10 - plates
11 - tubes
12 - waterframes
13 - carrier (FOUP, SMIF pod, cassette)
14 - substrate

MHEAD     Format: B:10 (invariant)     Used by: S9F1 S9F3 S9F5 S9F7 S9F11
    message header of received block         Example: "B:10 0x00 0x00 0x01 0x02 0x00 0x00 0x00 0x00 0x00 0x0f "

MID     Format: A:16 (varies)     Used by: S2F27 S3F2 S3F4 S3F7 S3F9 S3F12 S3F13 S4F1 S4F3 S4F5 S4F7 S4F9 S4F11 S4F13 S4F15 S4F17 S7F7 S7F8 S7F10 S7F11 S7F13 S7F35 S7F36 S12F1 S12F3 S12F4 S12F5 S12F7 S12F9 S12F11 S12F13 S12F14 S12F15 S12F16 S12F17 S12F18 S16F3 S18F10 S18F11 S18F16
    material ID, E40 restricts to A:n         Example: "A:10 ee052793.1"

MIDAC     Format: B:1 (invariant)     Used by: S3F14
    material ID ack         Example: "B:1 0x00"

0 - ok
1 - invalid port
2 - material not present

MIDRA     Format: B:1 (invariant)     Used by: S3F12
    material ID Ack code         Example: "B:1 0x01"

0 - MID follows
1 - no MID
2 - MID to be sent in S3F13

MLCL     Format: U4:1 (varies)     Used by: S12F4 S12F5
    message length in bytes         Example: "U4:1 656"

MMODE     Format: B:1 (invariant)     Used by: S7F15
    matrix mode selection         Example: "B:1 0x00"

1 - host source
2 - local source
3 - host immediate

NACDS     Format: U2:n (varies)     Used by: S7F22
    vector of not after command codes         Example: "U2:0"

NBCDS     Format: U2:n (varies)     Used by: S7F22
    vector of not before command codes         Example: "U2:0"

NULBC     Format: A:n (varies)     Used by: S12F1 S12F3 S12F4
    null bin code value         Example: "A:1 {x}"

OBJACK     Format: U1:1 (invariant)     Used by: S14F2 S14F4 S14F6 S14F8 S14F10 S14F12 S14F14 S14F16 S14F18 S14F26 S14F28
    acknowledge code, 0 ok, 1 error         Example: "U1:1 0"

OBJCMD     Format: U1:1 (invariant)     Used by: S14F15 S14F17
    Specifies an action to be performed by an object         Example: "U1:1 1"

1 - Attach to requestor
2 - detach from requestor
3 - reattach to requestor
4 - set attributes

OBJID     Format: A:80 (varies)     Used by: S1F19 S14F1 S14F2 S14F3 S14F4 S20F1 S20F3 S20F5 S20F7 S20F9 S20F11 S20F13 S20F15 S20F17 S20F19 S20F21 S20F23 S20F25 S20F27 S20F29 S20F31 S20F33
    E39 object identifier 1-80 chars 0x20-0x7e but not >, ?, *, or ~. Does not begin or end with space.         Example: "A:7 Job0001"

OBJSPEC     Format: A:n (varies)     Used by: S2F49 S13F11 S13F13 S13F15 S14F1 S14F3 S14F5 S14F7 S14F9 S14F10 S14F11 S14F13 S14F15 S14F17 S14F19 S14F25 S14F27 S15F7 S15F23 S15F43 S15F47
    E39 structured text identifying an object, [object type:object id>]+         Example: "A:21 {Table:TableARAMSCode>}"

OBJTOKEN     Format: U4:1 (invariant)     Used by: S14F14 S14F15 S15F37 S15F39 S15F41
    token used for authorization         Example: "U4:1 34896"

OBJTYPE     Format: A:40 (varies)     Used by: S1F19 S14F1 S14F3 S14F6 S14F7 S14F8 S14F9 S14F25 S14F26 S14F27 S20F1 S20F3 S20F5 S20F7 S20F9 S20F11 S20F13 S20F15 S20F17 S20F19 S20F21 S20F23 S20F25 S20F27 S20F29 S20F31 S20F33
    object class name, chars 0x20-0x7e but not >, ?, *, or ~. Does not begin or end with space.         Example: "A Carrier"

OCEACK     Format: U1:1 (invariant)     Used by: S20F6
    event completion code         Example: "U1:1 0"

0 - done
1 - OK
2 - NG
3 - Error

OFLACK     Format: B:1 (invariant)     Used by: S1F16
    offline acknowledge, 0 ok         Example: "B:1 0x00"

ONLACK     Format: B:1 (invariant)     Used by: S1F18
    online acknowledge, 0 ok         Example: "B:1 0x00"

0 - ok
1 - refused
2 - already online

OPEID     Format: A:16 (invariant)     Used by: S20F4 S20F5 S20F6 S20F7 S20F8 S20F9 S20F11 S20F12 S20F13 S20F13 S20F15 S20F15 S20F17 S20F17 S20F18 S20F19 S20F20 S20F20 S20F21 S20F21 S20F23 S20F23 S20F27 S20F27 S20F29 S20F30 S20F31 S20F32 S20F33
    recipe operation identifier         Example: "A:6 eop001"

OPETYPE     Format: U1:1 (invariant)     Used by: S20F3 S20F5 S20F7 S20F9 S20F11 S20F13 S20F15 S20F17 S20F19 S20F21 S20F23 S20F27 S20F29 S20F31 S20F33
    recipe operation type         Example: "U1:1 0"

0 - COP
1 - EOP
2 - FOP
3 - ROP
4 - POP

OPID     Format: U4:1 (varies)     Used by: S6F25 S14F19 S14F21 S15F21 S15F29 S15F30 S15F37 S15F41 S15F44 S15F46
    operation identifier         Example: "U4:1 1"

ORLOC     Format: B:1 (invariant)     Used by: S12F1 S12F3 S12F4
    origin location         Example: "B:1 0x00"

0 - center die of wafer
1 - upper right
2 - upper left
3 - lower left
4 - lower right

OUTPTN     Format: B:1 (varies)     Used by: S3F35
    output port (PTN)         Example: "B:1 0x02"

PARAMNAME     Format: A:n (invariant)     Used by: S3F23 S3F25
    argument name         Example: "A ServiceStatus"

PARAMVAL     Format: U1:1 (varies)     Used by: S3F23 S3F25
    argument value, only defined use is ServiceStatus, 0 = OUT OF SERVICE, 1 = IN SERVICE         Example: "U1:1 1"

PDEATTRIBUTE     Format: U1:1 (invariant)     Used by: S19F1 S19F2
    a reportable PDE attribute type, not necessarily useable in a filter expression         Example: "U1:1 1"

0 - RESERVED
1 - name
2 - gid
3 - groupName
4 - description
5 - type
6 - executable
7 - maxAntecendents
8 - createDate
9 - createNode
10 - author
11 - userInfo
12 - supplierInfo
13 - checksum

PDEATTRIBUTENAME     Format: U1:1 (invariant)     Used by: S19F1
    identifies a PDE attribute type         Example: "U1:1 1"

0 - RESERVED
1 - name
2 - gid
3 - groupName
4 - description
5 - type
6 - executable
7 - RESERVED
8 - createDate
9 - createNode
10 - author
11 - userInfo
12 - supplierInfo

PDEATTRIBUTEVALUE     Format: A (varies)     Used by: S19F1 S19F2
    contains the value of a PDE Attribute, may be type L, A, TF, U1         Example: "A {2007-12-31T17:00:03}"

PDEREF     Format: A:36 (invariant)     Used by: S19F15 S19F16 S19F17
    The UID of a PDE or of a PDE group formatted as a 36 character string with runs of 8, 4, 4, 4, and 12 characters joined by hyphens.         Example: "A:36 {12345678-1234-1234-1234-123456789ABC}"

PECEACK     Format: U1:1 (invariant)     Used by: S20F32
    event completion code         Example: "U1:1 0"

0 - Done
1 - Error

PECRSLT     Format: U1:1 (invariant)     Used by: S20F32
    RMS result         Example: "U1:1 0"

0 - Pass
1 - Fail

PFCD     Format: B:1 (invariant)     Used by: S6F9
    predefined form selector         Example: "B:1 0x02"

PGRPACTION     Format: A:n (invariant)     Used by: S3F23
    port group command, an alias for PORTACTION?         Example: "A CancelReservationAtPort"

PODID     Format: A:n (invariant)     Used by: S3F35
    OBJSPEC for a Pod instance         Example: "A:10 {0000000124}"

PORTACTION     Format: A:n (invariant)     Used by: S3F25
    ChangeServiceStatus, CancelReservationAtPort or ReserveAtPort         Example: "A ChangeServiceStatus"

PORTGRPNAME     Format: A:n (invariant)     Used by: S3F21 S3F23
    name of a group of ports         Example: "A:7 buffer1"

PPARM     Format: A:n (varies)     Used by: S7F23 S7F26 S7F31
    process parameter, any scalar or vector         Example: "A:5 {185.0}"

PPBODY     Format: B:n (varies)     Used by: S7F3 S7F6 S7F36
    process program data, any non-list type         Example: "B:0"

PPGNT     Format: B:1 (invariant)     Used by: S7F2 S7F30
    process program transfer grant status         Example: "B:1 0x00"

0 - Ok
1 - already have
2 - no space
3 - invalid PPID
4 - busy, try later
5 - will not accept
6 - other error

PPID     Format: A:80 (varies)     Used by: S2F27 S7F1 S7F3 S7F5 S7F6 S7F8 S7F10 S7F11 S7F13 S7F17 S7F20 S7F23 S7F25 S7F26 S7F27 S7F31 S7F33 S7F34 S7F36
    process program ID         Example: "A:6 banana"

PRAXI     Format: B:1 (invariant)     Used by: S12F1 S12F3
    process access         Example: "B:1 0x00"

PRCMDNAME     Format: A:6 (invariant)     Used by: S16F5
    process job commmands, START, STOP, PAUSE, RESUME, ABORT, CANCEL         Example: "A:6 CANCEL"

PRCPREEXECHK     Format: U1:1 (invariant)     Used by: S20F25
    Enable Pre-Execution checking         Example: "U1:1 0"

0 - disabled
1 - enabled

PRDCT     Format: U4:1 (varies)     Used by: S12F1 S12F4
    process die count         Example: "U4:1 432"

PREACK     Format: U1:1 (invariant)     Used by: S20F24
    event completion code         Example: "U1:1 0"

0 - done
1 - error

PREVENTID     Format: U1:1 (varies)     Used by: S16F9
    process job event ID         Example: "U1:1 1"

1 - waiting for material
2 - job state change

PRJOBID     Format: A:n (invariant)     Used by: S16F4 S16F5 S16F6 S16F7 S16F9 S16F11 S16F12 S16F15 S16F16 S16F17 S16F18 S16F20 S16F23 S16F25 S16F26 S20F27 S20F29 S20F31 S20F33
    process job identifier         Example: "A:7 {pj00001}"

PRJOBMILESTONE     Format: U1:1 (varies)     Used by: S16F7
    process job status         Example: "U1:1 1"

1 - setup
2 - in process
3 - processing complete
4 - job complete
5 - waiting for start

PRJOBSPACE     Format: U2:1 (invariant)     Used by: S16F22
    the number of process jobs that can be created         Example: "U2:1 32"

PRMTRLORDER     Format: U1:1 (invariant)     Used by: S16F29
    ordering method for pending process jobs         Example: "U1:1"

1 - arrival sequence
2 - maximize throughput
3 - listed sequence

PRPAUSEEVENTID     Format: U4:1 (varies)     Used by: S16F11 S16F15
    an event identifier for which a process job should be paused         Example: "U4:1 1501"

PRPROCESSSTART     Format: TF:1 (invariant)     Used by: S16F3 S16F11 S16F15 S16F25
    automatic start flag, false implies manual start         Example: "TF:1 1"

PRRECIPEMETHOD     Format: U1:1 (invariant)     Used by: S16F3 S16F11 S16F15
    recipe type         Example: "U1:1 0"

1 - recipe without variable tuning
2 - recipe with variable tuning

PRSTATE     Format: U1:1 (invariant)     Used by: S16F20
    process job state, E40 definition         Example: "U1:1 1"

0 - Queued/pooled
1 - setting up
2 - waiting for start
3 - processing
4 - process complete
5 - reserved
6 - pausing
7 - paused
8 - stopping
9 - aborting

PSRACK     Format: U1:1 (invariant)     Used by: S20F28
    service completion code         Example: "U1:1 0"

0 - done
1 - error

PSREACK     Format: U1:1 (invariant)     Used by: S20F34
    event completion code         Example: "U1:1 0"

0 - done
1 - error

PTN     Format: U1:1 (varies)     Used by: S3F11 S3F12 S3F13 S3F17 S3F21 S3F25 S3F27 S3F28 S4F1 S4F3 S4F5 S4F7 S4F9 S4F11 S4F13 S4F15 S4F17
    material port number, E87 shows type U1:1 with data 1-255         Example: "U1:1 1"

QPRKEACK     Format: U1:1 (invariant)     Used by: S20F30
    event completion code         Example: "U1:1 0"

0 - done
1 - error

QREACK     Format: U1:1 (invariant)     Used by: S20F22
    event completion code         Example: "U1:1 0"

0 - done
1 - error

QRXLEACK     Format: U1:1 (invariant)     Used by: S20F20
    event completion code         Example: "U1:1 0"

0 - done
1 - error

QUA     Format: B:1 (invariant)     Used by: S3F2 S3F4 S3F5 S3F7
    quantity (format limits max to 255!)         Example: "B:1 0x18"

RAC     Format: U1:1 (varies)     Used by: S2F20
    reset acknowledge         Example: "U1:1 1"

0 - ok
1 - denied

RCMD     Format: A:n (varies)     Used by: S2F21 S2F41 S2F49
    remote command, GEM requires a maximum length of 20 printable characters, taken from hex 21-7E (no spaces)         Example: "A:5 {pause}"

RCPATTRDATA     Format: A:n (varies)     Used by: S6F25 S15F13 S15F15 S15F15 S15F18 S15F18 S15F27 S15F28 S15F30 S15F32
    the value of a recipe attribute, any type of data including list         Example: "A:3 150"

RCPATTRID     Format: A:n (invariant)     Used by: S6F25 S15F13 S15F15 S15F15 S15F18 S15F18 S15F27 S15F28 S15F30 S15F32
    the name of a recipe attribute, but not used to indicate the recipe identifier         Example: "A:7 {author}"

RCPBODY     Format: B:n (varies)     Used by: S15F13 S15F15 S15F18 S15F27 S15F32
    Recipe body

RCPBODYA     Format: A:n (varies)     Used by: S20F15 S20F18 S20F23 S20F32
    user defined recipe body, list allowed         Example: "A:0"

RCPCLASS     Format: A:n (invariant)     Used by: S15F11
    Recipe class

RCPCMD     Format: U1:1 (invariant)     Used by: S15F21 S15F22
    recipe action         Example: "U1:1 5"

5 - delete
8 - unprotect
9 - protect
10 - verify
11 - link
12 - unlink
13 - certify
14 - de-certify
15 - download
16 - upload

RCPDEL     Format: U1:1 (invariant)     Used by: S15F35
    recipe action         Example: "U1:1 0"

0 - delete
1 - deselect

RCPDESCLTH     Format: U4:1 (varies)     Used by: S15F24
    the byte length of a recipe         Example: "U4:1 15645"

RCPDESCNM     Format: A:n (invariant)     Used by: S15F24
    Identifies a descriptor type "ASDesc", "BodyDesc", "GenDesc"         Example: "A:6 ASDesc"

RCPDESCTIME     Format: A:16 (invariant)     Used by: S15F24
    timestamp of a recipe section "YYYYMMDDhhmmsscc"         Example: "A:16 2006081515441233"

RCPID     Format: A:n (invariant)     Used by: S15F21 S15F23 S15F28 S15F29 S15F30 S15F33 S15F35 S15F37 S15F41 S15F44 S15F53
    recipe identifier conforming to OBJSPEC

RCPNAME     Format: A:n (invariant)     Used by: S15F11
    recipe name         Example: "A:22 HU:me:cmos70nm-default"

RCPNEWID     Format: A:n (invariant)     Used by: S15F19 S15F41 S15F44 S15F45
    the new recipe identifier

RCPOWCODE     Format: TF:1 (invariant)     Used by: S15F27 S15F49
    recipe overwrite code, true=overwrite ok, false=do not overwrite         Example: "TF:1 1"

RCPPARNM     Format: A:256 (invariant)     Used by: S15F25 S15F33 S16F3 S16F11 S16F15 S16F23
    the name of a recipe variable parameter         Example: "A:15 {AcclimationTime}"

RCPPARRULE     Format: A:80 (invariant)     Used by: S15F25
    the restrictions applied to a recipe variable parameter setting

RCPPARVAL     Format: A:80 (varies)     Used by: S15F25 S15F33 S16F3 S16F11 S16F15 S16F23
    the value of a recipe variable parameter, any scalar format type         Example: "A:4 0.52"

RCPRENAME     Format: TF:1 (invariant)     Used by: S15F19
    whether a recipe is to be renamed (TRUE) or copied (FALSE)         Example: "TF:1 1"

RCPSECCODE     Format: B:1 (invariant)     Used by: S15F15 S15F16 S15F17
    indicates the sections of a recipe         Example: "B 3"

1 - generic attributes only
3 - generic attributes and body
4 - all agent specific datasets
7 - generic attributes, body, and all agent specific datasets
8 - single agent specific dataset
11 - generic attributes, body, and single agent specific dataset

RCPSECNM     Format: A:n (invariant)     Used by: S15F15 S15F15 S15F18 S15F18
    Recipe section name, "Generic", "Body", "ASDS"         Example: "A:4 Body"

RCPSPEC     Format: A:n (invariant)     Used by: S6F25 S15F1 S15F9 S15F13 S15F15 S15F17 S15F19 S15F27 S15F31 S15F32 S15F45 S15F53 S16F3 S16F11 S16F15
    recipe specifier         Example: "A:10 {engqual001}"

RCPSTAT     Format: U1:1 (invariant)     Used by: S15F10
    Recipe status code         Example: "U1:1 0"

0 - does not exist
8 - unprotected
9 - protected

RCPUPDT     Format: TF:1 (invariant)     Used by: S15F13
    true for a recipe update, false for create         Example: "TF:1 1"

RCPVERS     Format: A:n (invariant)     Used by: S15F10 S15F12
    recipe version

READLN     Format: U4:1 (varies)     Used by: S13F5
    maximum number of bytes or characters to read         Example: "U4:1 16000"

REAPER     Format: A:80 (invariant)     Used by: S4F27
    transfer hand-off reader PER configuration         Example: "A:25 {thguac tog nc.moc.tobonis}"

RECLEN     Format: U4:1 (varies)     Used by: S13F4
    maximum number of bytes or characters in a discrete record         Example: "U4:1 1024"

REFP     Format: I4:2 (varies)     Used by: S12F1 S12F4
    x y reference point         Example: "I4:2 0 0"

REPGSZ     Format: U4:1 (varies)     Used by: S2F23 S17F5
    reporting group size, TOTSMP modulo REPGSZ should be 0         Example: "U4:1 5"

RESOLUTION     Format: A:36 (invariant)     Used by: S19F15 S19F16 S19F17
    the UID of a PDE         Example: "A:36 {B62C4E8D-62CC-404B-BBBF-BF3E3BBB137}"

RESPDESTAT     Format: U1:1 (invariant)     Used by: S19F16
    status codes for PDE resolution         Example: "U1:1 0"

0 - OK
1 - invalid input map
2 - map not found
3 - PDE reference resolution was denied
4 - PDE reference not found
5 - PDE not found
255 - other error

RESPEC     Format: A:n (invariant)     Used by: S15F29 S15F33 S15F35
    object specifier for the recipe executor

RETAINRECIPE_DISABLE     Format: U1:1 (invariant)     Used by: S20F1
    Disable automatic retention of recipes on disconnect         Example: "U1:1 0"

0 - retention is not disabled
1 - retention is disabled

RETICLEID     Format: A:n (invariant)     Used by: S3F35
    OBJSPEC value for a reticle         Example: "A:0"

RETICLEID2     Format: A:n (invariant)     Used by: S3F35
    OBJSPEC value for a second reticle         Example: "A:0"

RETPLACEINSTR     Format: U1:1 (invariant)     Used by: S3F35
    pod slot reticle place instruction         Example: "U1:1 0"

0 - place
1 - skip
2 - occupied

RETREMOVEINSTR     Format: U1:1 (invariant)     Used by: S3F35
    pod slot reticle remove instruction         Example: "U1:1 0"

0 - remove
1 - skip

REVID     Format: A:256 (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    recipe revision information related to SRO         Example: "A:0"

RIC     Format: U1:1 (varies)     Used by: S2F19
    reset code, 1 means power up reset         Example: "U1:1 1"

RMACK     Format: U1:1 (invariant)     Used by: S6F25 S15F4 S15F6 S15F8 S15F10 S15F12 S15F14 S15F16 S15F18 S15F20 S15F22 S15F24 S15F26 S15F28 S15F30 S15F32 S15F34 S15F36 S15F38 S15F40 S15F42 S15F44 S15F48 S15F53
    recipe managment completion code         Example: "U1:1 0"

0 - ok
1 - cannot perform action
2 - completed with errors
3 - initiated for asynchronous completion
4 - no request exists for indicated action

RMCHGSTAT     Format: U4:1 (varies)     Used by: S6F25
    object change type         Example: "U4:1 1"

0 - no change
1 - created
2 - updated
3 - stored (new)
4 - replaced
5 - deleted
6 - copied (new object)
7 - renamed
8 - unprotected
9 - protected
10 - verified
11 - linked
12 - unlinked
13 - certified
14 - de-certified
15 - selected
16 - deselected

RMCHGTYPE     Format: U4:1 (varies)     Used by: S15F37 S15F41 S15F44 S15F45 S15F46
    type of change for a recipe

0 - no change
1 - create
2 - update
5 - delete
6 - copy (new object)
7 - rename
8 - unprotect
9 - product
10 - verify
11 - link
12 - unlink
13 - certify
14 - de-certify
15 - change generic attribute
16 - change agent specific attribute
17 - change both generic and agent specific attributes

RMDATASIZE     Format: U4:1 (varies)     Used by: S15F1
    the maximum total message body length of a SECS-II message         Example: "U4:1 125000"

RMGRNT     Format: B:1 (invariant)     Used by: S15F2 S15F37 S15F46
    grant code, 0 ok         Example: "B:1 0"

0 - OK
1 - not now
2 - no space
3 - request is on hold whatever that means

RMNEWNS     Format: A:n (invariant)     Used by: S15F5
    new name for a recipe namespace

RMNSCMD     Format: U1:1 (invariant)     Used by: S15F3 S15F39 S15F41
    recipe namespace command         Example: "U1:1 1"

1 - create
5 - delete

RMNSSPEC     Format: A:n (invariant)     Used by: S15F3 S15F5 S15F11 S15F21 S15F25 S15F47
    object id of a recipe namespace

RMRECSPEC     Format: A:n (invariant)     Used by: S15F39 S15F41 S15F47
    object id of a distributed recipe namespace recorder

RMREQUESTOR     Format: TF:1 (invariant)     Used by: S15F41 S15F44
    True when the initiator of a change request is an attached segment, otherwise false         Example: "TF:1 1"

RMSEGSPEC     Format: A:n (invariant)     Used by: S15F37 S15F39 S15F41 S15F44 S15F47
    The object ID of a distributed recipe namespace segment

RMSPACE     Format: U4:1 (varies)     Used by: S15F8
    the amount of storage available in bytes for at least one recipe

RMSPWD     Format: A:64 (invariant)     Used by: S20F5
    password of SRO user         Example: "A:4 qzzy"

RMSUSERID     Format: A:64 (invariant)     Used by: S20F5
    SRO userID         Example: "A:5 admin"

ROWCT     Format: U4:1 (varies)     Used by: S12F1 S12F4
    row count in die increments         Example: "U4:1 24"

RPMACK     Format: U1:1 (invariant)     Used by: S3F36
    reticle pod management ack code         Example: "U1:1 0"

0 - ok
1 - service does not exist
2 - cannot perform now
3 - non-existent parameter(s)
4 - initiated with asynchronous completion event
5 - service is not completed or prohibited
6 - non-existent object

RPSEL     Format: U1:1 (invariant)     Used by: S12F1 S12F4
    reference point select         Example: "U1:1 0"

RPTID     Format: U4:1 (varies)     Used by: S2F33 S2F35 S2F52 S2F53 S2F54 S2F56 S6F11 S6F13 S6F16 S6F18 S6F19 S6F21 S6F27 S6F30 S17F1 S17F2 S17F3 S17F4 S17F5 S17F9 S17F11 S17F12
    report ID         Example: "U4:1 1"

RPTOC     Format: TF:1 (invariant)     Used by: S17F5
    send only changed data trace report flag         Example: "TF:1 1"

RQCMD     Format: TF:1 (invariant)     Used by: S7F22
    flag that command is required         Example: "TF:1 1"

RRACK     Format: B:1 (invariant)     Used by: S4F18
    request to receive acknowledge         Example: "B:1 0x00"

0 - ok
1 - invalid port
2 - material is not at port
3 - retryable busy
4 - sender lacks permission

RRACK_S20     Format: U1:1 (invariant)     Used by: S20F18
    service completion code         Example: "U1:1 0"

0 - done
1 - error

RSACK     Format: B:1 (invariant)     Used by: S4F2
    ready to send acknowledge         Example: "B:1 0x00"

0 - ok
1 - invalid port
2 - port is occupied
3 - retryable busy
4 - receiver lacks permission

RSDA     Format: B:1 (invariant)     Used by: S6F24
    spool request reply         Example: "B:1 0x00"

0 - ok
1 - retryable busy
2 - no spool data

RSDC     Format: U1:1 (invariant)     Used by: S6F23
    spool request code         Example: "U1:1 0"

0 - transmit
1 - purge

RSINF     Format: I4:3 (varies)     Used by: S12F7 S12F14
    starting location for row or column, x,y,direction triplet         Example: "I4:3 0 0 -1"

RSPACK     Format: B:1 (invariant)     Used by: S2F44
    spooling response         Example: "B:1 0x00"

0 - ok
1 - rejected

RTSRSPSTAT     Format: U1:1 (invariant)     Used by: S19F10
    PDE transfer request reply code, non-zero means denied         Example: "U1:1 0"

0 - OK
1 - insufficient resources
2 - transfer container too large
3 - insufficient storage space
255 - other denial

RTYPE     Format: U1:1 (varies)     Used by: S13F4
    type of data record         Example: "U1:1 0"

0 - Stream
1 - Discrete

RecID     Format: A:n (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    recipe spec or ppid

SDACK     Format: B:1 (invariant)     Used by: S12F2
    setup data ack, 0 ok         Example: "B:1 0x00"

SDBIN     Format: B:1 (invariant)     Used by: S12F17
    send bin data flag, 0=send, else do not         Example: "B:1 0x00"

SENDRSPSTAT     Format: U1:1 (invariant)     Used by: S19F13
    Return codes for the Send PDE request, non-zero means failure         Example: "U1:1 0"

0 - OK
1 - insufficent resources
2 - no match for the execution target
3 - the PDE already exists and cannot be overwritten at this time
4 - PDE failed verification
5 - transfer not allowed
255 - other error

SEQNUM     Format: U4:1 (varies)     Used by: S7F27
    process program command number         Example: "U4:1 1"

SFCD     Format: B:1 (invariant)     Used by: S1F5 S1F7
    status form code         Example: "B:1 0x01"

SHEAD     Format: B:10 (invariant)     Used by: S9F9
    message header of sent block         Example: "B:10 0x00 0x00 0x01 0x02 0x00 0x00 0x00 0x00 0x00 0x0f "

SLOTID     Format: U1:1 (invariant)     Used by: S16F11 S16F15
    slot position within a carrier         Example: "U1:1 1"

SMPLN     Format: U4:1 (varies)     Used by: S6F1
    sample number         Example: "U4:1 10"

SOFTREV     Format: A:20 (invariant)     Used by: S1F2 S1F13 S1F14 S7F22 S7F23 S7F26 S7F31
    software revision         Example: "A 1.0"

SPAACK     Format: U1:1 (invariant)     Used by: S2F4 S20F26
    service completion code         Example: "U1:1 0"

0 - done
1 - error

SPD     Format: B:n (invariant)     Used by: S2F3 S2F6
    service program data         Example: "B:3 1 2 3"

SPID     Format: A:6 (invariant)     Used by: S2F1 S2F5 S2F7 S2F9 S2F12
    service program identifier         Example: "A:6 bin007"

SPNAME     Format: A:n (invariant)     Used by: S14F19 S14F20 S14F21 S14F28
    service parameter name         Example: "A:10 {BatchLocID}"

SPR     Format: A:n (varies)     Used by: S2F10
    device dependent, any data type         Example: "A:19 {shutdown -i5 -g0 -y}"

SPVAL     Format: A:n (varies)     Used by: S14F19 S14F20 S14F21
    service parameter value, any format type         Example: "A:1 {1}"

SSAACK     Format: U1:1 (invariant)     Used by: S20F2
    service completion code         Example: "U4:1 0"

0 - done
1 - error

SSACK     Format: A:2 (invariant)     Used by: S18F2 S18F4 S18F6 S18F8 S18F10 S18F12 S18F14 S18F16
    two character codes for success or failure, NO Normal, EE exec. err, CE comm. err, HE h/w err, TE tag err         Example: "A:2 NO"

SSCMD     Format: A:n (invariant)     Used by: S18F13
    subsystem action command

STATUS     Format: A:n (invariant)     Used by: S18F2 S18F4 S18F6 S18F8 S18F10 S18F12 S18F14 S18F16
    subsystem status data

STATUSTXT     Format: A:80 (invariant)     Used by: S19F2 S19F4 S19F6 S19F8 S19F10 S19F13 S19F16 S19F18
    status response description         Example: "A:2 {Ok}"

STIME     Format: A:32 (invariant)     Used by: S6F1
    ECV TimeFormat controls format, 0=A:12 YYMMDDHHMMSS, 1=A:16 YYYYMMDDHHMMSScc,2=YYYY-MM-DDTHH:MM:SS.s[s]*{Z|+hh:mm|-hh:mm}         Example: "A:16 2005041209345240"

STRACK     Format: B:1 (invariant)     Used by: S2F44
    spooling stream acknowledge         Example: "B:1 0x00"

1 - not allowed for stream
2 - unknown stream
3 - unknown function
4 - secondary function

STRID     Format: U1:1 (invariant)     Used by: S2F43 S2F44 S2F60
    stream value         Example: "U1:1 6"

STRP     Format: I2:2 (varies)     Used by: S12F9 S12F16
    x y die coordinate starting position         Example: "I2:2 0 0"

SV     Format: A:n (varies)     Used by: S1F4 S1F6 S6F1
    status variable value         Example: "U1:1 65"

SV0     Format: A:0 (varies)     Used by: S1F8
    Zero length value used to convey format type         Example: "A:0"

SVCACK     Format: B:1 (invariant)     Used by: S14F20 S14F20 S14F21
    service acknowledge code         Example: "B:1 0x00"

0 - ok done
1 - unknown service
2 - cannot do now
3 - 1 or more parameters invalid
4 - initiated for asynchronous completion
5 - not completed or prohibited
6 - no such object

SVCNAME     Format: A:n (invariant)     Used by: S14F19 S14F26 S14F27 S14F28
    service name         Example: "A:5 {pause}"

SVID     Format: U4:1 (varies)     Used by: S1F3 S1F11 S1F12 S2F23
    status variable ID         Example: "U4:1 810"

SVNAME     Format: A:n (invariant)     Used by: S1F8 S1F12
    status variable name         Example: "A:13 {AlarmsEnabled}"

TARGETID     Format: A:n (invariant)     Used by: S18F1 S18F2 S18F3 S18F4 S18F5 S18F6 S18F7 S18F8 S18F9 S18F10 S18F11 S18F12 S18F13 S18F14 S18F15 S18F16
    the OBJSPEC for the target object         Example: "A:2 01"

TARGETPDE     Format: A:36 (invariant)     Used by: S19F15 S19F17
    the UID of the target PDE, a 36 character string with runs of 8,4,4,4, and 12 characters joined by hyphens.         Example: "A:36 {ABCD0123-62CC-404b-BBBF-BF3E3BBB1374}"

TARGETSPEC     Format: A:40 (invariant)     Used by: S14F17 S15F43
    Specifier of target object

TBLACK     Format: U1:1 (invariant)     Used by: S13F14 S13F16
    acknowledge code         Example: "U1:1 0"

0 - ok
1 - failure

TBLCMD     Format: U1:1 (invariant)     Used by: S13F13 S13F15
    table command         Example: "U1:1 0"

0 - complete table
1 - new rows (add)
2 - new columns (append)
3 - replace rows
4 - replace columns

TBLELT     Format: A:n (varies)     Used by: S13F13 S13F15 S13F16
    table element any type, list types or array types are discouraged, first column type must be a primary key value and not be a list or array         Example: "A:4 {0001}"

TBLID     Format: A:80 (varies)     Used by: S13F13 S13F15 S13F16
    table identifier, a kind of OBJSPEC         Example: "A:14 {Table:TableARAMSCode>}"

TBLTYP     Format: A:n (invariant)     Used by: S13F13 S13F15 S13F16
    denotes the format and application of the table, conforms to OBJTYPE         Example: "A:5 {Table}"

TCID     Format: A:36 (invariant)     Used by: S19F6 S19F8 S19F9 S19F10 S19F11
    The identity of a transfer container specified as a 36 character string with runs of 8, 4, 4, 4, and 12 characters joined by hyphens         Example: "A:36 {ff478f2d-e398-449a-93d4-62b072789fed}"

TEXT     Format: A:120 (varies)     Used by: S10F1 S10F3 S10F5 S10F9
    line of text for display, no standard max size         Example: "A:38 {chamber cleaning PM must be done NEXT!}"

TIAACK     Format: B:1 (invariant)     Used by: S2F24
    trace acknowledgement code         Example: "B:1 0x00"

0 - ok
1 - too many SVIDs
2 - no more traces allowed
3 - invalid period
4 - unknown SVID
5 - bad REPGSZ

TIACK     Format: B:1 (invariant)     Used by: S2F32
    time set acknowledge         Example: "B:1 0x00"

0 - ok
1 - not done

TID     Format: B:1 (invariant)     Used by: S10F1 S10F3 S10F5 S10F7
    terminal ID         Example: "B:1 0x00"

TIME     Format: A:32 (invariant)     Used by: S2F18 S2F31
    ECV TimeFormat controls format, 0=A:12 YYMMDDHHMMSS, 1=A:16 YYYYMMDDHHMMSScc,2=YYYY-MM-DDTHH:MM:SS.s[s]*{Z|+hh:mm|-hh:mm}         Example: "A:16 2008121708371902"

TIMESTAMP     Format: A:32 (invariant)     Used by: S5F9 S5F11 S5F15 S15F41 S15F44 S16F7 S16F9 S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    ECV TimeFormat controls format, 0=A:12 YYMMDDHHMMSS, 1=A:16 YYYYMMDDHHMMSScc,2=YYYY-MM-DDTHH:MM:SS.s[s]*{Z|+hh:mm|-hh:mm}         Example: "A:16 2005041408103105"

TOTSMP     Format: U4:1 (varies)     Used by: S2F23 S17F5
    total samples to be made, should be an even multiple of REPGSZ         Example: "U4:1 100"

TRACK     Format: TF:1 (invariant)     Used by: S4F20 S4F22 S4F23
    transfer activity success flag         Example: "TF:1 1"

TRANSFERSIZE     Format: U8:1 (invariant)     Used by: S19F9
    SIze in bytes of the TransferContainer. An 8 byte value but HSMS uses 4 byte message lengths!!!         Example: "U8:1 0x0000007F"

TRATOMCID     Format: U4:1 (varies)     Used by: S4F20
    assigned identifier for atomic transfer         Example: "U4:1 101"

TRAUTOD     Format: TF:1 (invariant)     Used by: S17F5
    delete upon completion flag         Example: "TF:1 1"

TRAUTOSTART     Format: TF:1 (invariant)     Used by: S4F19
    if true material transfer is initiated by the primary when ready         Example: "TF:1 0"

TRCMDNAME     Format: A:n (invariant)     Used by: S4F21
    text enum, CANCEL, PAUSE, RESUME, ABORT, STOP, STARTHANDOFF         Example: "A:5 {PAUSE}"

TRDIR     Format: U1:1 (invariant)     Used by: S4F19 S4F27
    transfer direction         Example: "U1:1 1"

1 - send material
2 - receive material

TRID     Format: A:n (varies)     Used by: S2F23 S2F62 S6F1 S6F27 S6F28 S6F30 S17F5 S17F6 S17F7 S17F8 S17F13 S17F14
    trace request ID         Example: "A:1 1"

TRJOBID     Format: B:1 (invariant)     Used by: S4F20 S4F21 S4F23
    assigned identifier for transfer job         Example: "B:1 0x60"

TRJOBMS     Format: U1:1 (invariant)     Used by: S4F23
    transfer job milestone         Example: "U1:1 1"

1 - started
2 - completed

TRJOBNAME     Format: A:80 (invariant)     Used by: S4F19 S4F23
    host assigned id for transfer job         Example: "A:13 TJH_U_M_E1086"

TRLINK     Format: U4:1 (varies)     Used by: S4F19 S4F27 S4F29 S4F31 S4F33 S4F35 S4F37 S4F39 S4F41
    task identifier correlation value         Example: "U4:1 3"

TRLOCATION     Format: U4:1 (varies)     Used by: S4F19 S4F27
    material transfer location         Example: "U4:1 1"

TROBJNAME     Format: A:n (varies)     Used by: S4F19 S4F27
    identifies material to be transferred         Example: "A:7 {c000678}"

TROBJTYPE     Format: U4:1 (varies)     Used by: S4F19 S4F27
    identifies type of object to be transferred         Example: "U4:1 7"

TRPORT     Format: U4:1 (varies)     Used by: S4F19 S4F27
    port identifier         Example: "U4:1 1"

TRPTNR     Format: A:n (invariant)     Used by: S4F19 S4F27
    EQNAME of transfer partner equipment         Example: "A:7 {AGV0001}"

TRPTPORT     Format: U4:1 (varies)     Used by: S4F19 S4F27
    transfer partner port         Example: "U4:1 1"

TRRCP     Format: A:80 (invariant)     Used by: S4F19
    name of transfer recipe for this handoff         Example: "A:17 {standard exchange}"

TRROLE     Format: U1:1 (invariant)     Used by: S4F19 S4F27
    indicates equipment transfer role         Example: "U1:1 1"

1 - primary
2 - secondary

TRTYPE     Format: U1:1 (invariant)     Used by: S4F19 S4F27
    equipment is active or passive transfer participant         Example: "U1:1 1"

1 - active
2 - passive

TSIP     Format: B:n (invariant)     Used by: S1F10
    transfer status of input ports         Example: "B:1 0x01"

1 - idle
2 - prep
3 - track on
4 - stuck in receiver

TSOP     Format: B:n (invariant)     Used by: S1F10
    transfer status of output ports         Example: "B:1 0x01"

1 - idle
2 - prep
3 - track on
4 - stuck in sender
5 - completion

TTC     Format: U4:1 (varies)     Used by: S3F4
    time to completion, standard does not specify units, in seconds??         Example: "U4:1 286"

TYPEID     Format: U1:1 (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    recipe type         Example: "U1:1 1"

0 - not used
1 - ProcessLink
2 - ProcessMain
3 - ProcessUnit
4 - Activity
5 - RecipeJob

UID     Format: A:36 (invariant)     Used by: S19F2 S19F3 S19F4 S19F5 S19F6 S19F7 S19F8 S19F13 S19F16 S19F18
    See SEMI E139. A unique identifier for a PDE consisting of a 36 character string with runs of 8, 4, 4, 4, and 12 characters separated by hyphens         Example: "A:36 {12345678-1234-1234-1234-123456789012}"

UNFLEN     Format: U4:1 (varies)     Used by: S7F34
    unformatted process program length if available, else 0         Example: "U4:1 0"

UNITS     Format: A:n (invariant)     Used by: S1F12 S1F22 S2F30 S2F48
    units identifier (see E5 Section 9)         Example: "A:0"

UPPERDB     Format: F4:1 (varies)     Used by: S2F45 S2F48
    the upper bound of a deadband limit         Example: "F4:1 185.0"

V     Format: A:n (varies)     Used by: S6F11 S6F13 S6F16 S6F18 S6F20 S6F22 S6F27 S6F30 S16F9
    variable value, any type including list         Example: "A:1 {0}"

VERID     Format: A:n (invariant)     Used by: S20F12 S20F13 S20F15 S20F17 S20F18 S20F20 S20F21 S20F23 S20F27 S20F30 S20F32
    composite key with RecipeID to identify a unique recipe         Example: "A:5 1.0.5"

VERIFYDEPTH     Format: U1:1 (invariant)     Used by: S19F17
    whether to check only the target, or the target and all referenced PDEs         Example: "U1:1 0"

0 - target only
1 - target and all referenced, directly or indirectly

VERIFYRSPSTAT     Format: U1:1 (invariant)     Used by: S19F13 S19F18
    PDE verification result, 0 success, 10 none, other error         Example: "U1:1 0"

0 - success
1 - invalid input map
2 - PDE reference not found
3 - PDE reference resolution denied
4 - PDE reference not found
5 - PDE not found
6 - checksum error
7 - syntax error
8 - content error
9 - execution target not matched
10 - output parameter error
11 - no verification performed
255 - other verification error

VERIFYSUCCESS     Format: TF:1 (invariant)     Used by: S19F18
    True if no errors were found         Example: "TF:1 1"

VERIFYTYPE     Format: U1:1 (invariant)     Used by: S19F17
    chooses the type of verification         Example: "U1:1 0"

0 - checksum validation
1 - complete validation

VID     Format: A:n (varies)     Used by: S1F21 S1F22 S1F24 S2F33 S2F45 S2F46 S2F47 S2F48 S2F54 S6F13 S6F18 S6F22 S16F9 S17F1
    A variable ID         Example: "A:3 810"

VLAACK     Format: B:1 (invariant)     Used by: S2F46
    variable limit attribute acknowledge         Example: "B:1 0x00"

0 - ok
1 - limit attribute definition error
2 - cannot perform now

WRACK     Format: U1:1 (invariant)     Used by: S20F16
    service completion code         Example: "U4:1 0"

0 - done
1 - full
2 - error

XDIES     Format: F4:1 (varies)     Used by: S12F1 S12F4
    X-axis die size         Example: "F4 5.0"

XYPOS     Format: I2:2 (varies)     Used by: S12F11 S12F18
    x y coordinate position         Example: "I2:2 0 0"

YDIES     Format: F4:1 (varies)     Used by: S12F1 S12F4
    Y-axis die size         Example: "F4 7.2"